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120510s2011 sz a sb 101 0 eng d |
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|z 2012405162
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|z 9780878492176 (pbk.)
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|z 0878492178 (pbk.)
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|z 9780878492176
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|z 9783038134817 (e-book)
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|a (OCoLC)897640678
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|a MiAaPQ
|c MiAaPQ
|d MiAaPQ
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4 |
|a TK7871.15.S55 I585 2009
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2 |
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|a International Symposium on Silicon Science
|n (5th :
|d 2009 :
|c Kiryū-shi, Japan)
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| 245 |
1 |
0 |
|a Silicon science and advanced micro-device engineering I
|h [electronic resource] :
|b selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /
|c edited by Osamu Hanaizumi and Masafumi Unno.
|
| 246 |
3 |
0 |
|a 5th International Symposium on Silicon Science
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| 246 |
3 |
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|a Fifth International Symposium on Silicon Science
|
| 246 |
3 |
0 |
|a International Symposium on Silicon Science
|
| 246 |
3 |
0 |
|a 1st International Conference on Advanced Micro-Device Engineering
|
| 246 |
3 |
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|a First International Conference on Advanced Micro-Device Engineering
|
| 246 |
3 |
0 |
|a International Conference on Advanced Micro-Device Engineering
|
| 246 |
3 |
0 |
|a ISSS & AMDE 2009
|
| 246 |
1 |
3 |
|a ISSS 2009
|
| 246 |
3 |
0 |
|a AMDE 2009
|
| 260 |
|
|
|a Stafa-Zurich ;
|a Enfield, N.H. :
|b Trans Tech Publications,
|c 2011.
|
| 300 |
|
|
|a xii, 282 p. :
|b ill.
|
| 440 |
|
0 |
|a Key engineering materials,
|x 1013-9826 ;
|v v. 459
|
| 504 |
|
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|a Includes bibliographical references and indexes.
|
| 506 |
|
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|a Access to electronic resources restricted to Simmons University students, faculty and staff.
|
| 533 |
|
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|a Electronic reproduction. Ann Arbor, MI : ProQuest, 2015. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.
|
| 650 |
|
0 |
|a Silicon
|v Congresses.
|
| 650 |
|
0 |
|a Nanostructures
|v Congresses.
|
| 650 |
|
0 |
|a Microelectronics
|v Congresses.
|
| 655 |
|
4 |
|a Electronic books.
|
| 700 |
1 |
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|a Hanaizumi, Osamu.
|
| 700 |
1 |
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|a Unno, Masafumi.
|
| 710 |
2 |
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|a Gunma Daigaku.
|b International Education and Research Center for Silicon Science.
|
| 710 |
2 |
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|a Gunma Daigaku.
|b Advanced Technology Research Center.
|
| 710 |
2 |
|
|a ProQuest (Firm)
|
| 711 |
2 |
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|a International Conference on Advanced Micro-Device Engineering
|n (1st :
|d 2009 :
|c Kiryū-shi, Japan)
|
| 856 |
4 |
0 |
|u https://ebookcentral.proquest.com/lib/simmons-ebooks/detail.action?docID=1872512
|y Access E-Book
|
| 999 |
f |
f |
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|s 5e62e4b0-1fac-11eb-99cd-4c044419675a
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| 852 |
|
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|b Online Resources
|h TK7871.15.S55 I585 2009
|0 d4fc8988-05a0-3c9e-a6c1-6d9b8c318630
|
