Bibliographic Details
| Online Access: |
Access E-Book
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| Access Note: | Access to electronic resources restricted to Simmons University students, faculty and staff. |
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| Corporate Authors: |
International Symposium on Silicon Science Kiryū-shi, Japan),
Gunma Daigaku. International Education and Research Center for Silicon Science.,
Gunma Daigaku. Advanced Technology Research Center.,
ProQuest (Firm),
International Conference on Advanced Micro-Device Engineering |
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| Other Authors: |
Hanaizumi, Osamu.,
Unno, Masafumi. |
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| Format: | Electronic
Conference Proceeding
eBook
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| Language: | English |
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| Published: |
Stafa-Zurich ; Enfield, N.H. :
Trans Tech Publications,
2011.
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| Series: | Key engineering materials,
v. 459
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| Subjects: |
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